“EUV Tech was created on the premise of generating and measuring EUV light. Today, we support the semiconductor industry by manufacturing precision-built tools for our worldwide customer base.”
-Rupert Perera, Ph.D., Founder of EUV Tech
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EUV HVM Reflectometer System
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EUV Accelerated Exposure Test System
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Actinic Image Review System (AIRES®)
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EUV Pellicle Transmission Measurement System
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EUV N&K and Phase Measurement System
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EUV FALCON Photoresist Flood Exposure System
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EUV Pellicle Deflection Tool