The EUV Pellicle Deflection Tool (PDT) performs pellicle-integrity checks by measuring the rate and amount of deflection, or sagging, of a pellicle through the application of differential pressure across the pellicle’s membrane. Numerous user configurable tolerance bounds allow the operators to ensure each and every pellicle meets the requirements for high-volume production use.

Tracks the maximum differential pressure and level of deflection in two situations:

A “normal” mode when the pellicle is used in customary operating conditions
A more aggressive operating mode that pushes the pellicle beyond normal operating conditions in order to instigate and investigate breakage

Uses high-speed imaging to capture pellicle ruptures that can later be used for fail-mode analysis
User-friendly system software
Low cost of ownership
Simple facilities connections
Touchscreen interface
Integrated cleanliness system for easy cleanup

To request the Pellicle Deflection Tool’s product data sheet, please fill out the Contact Form and the data sheet will be emailed to you.