Leader in EUV Metrology Solutions

EUV TECH IS THE WORLD'S LEADING MANUFACTURER OF AT WAVELENGTH EUV METROLOGY EQUIPMENT

 
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Overview

Started in 1997, EUV Tech has pioneered the development of EUV Metrology Tools. Our products have been in operation at customer facilities for over 20 years.

Our expertise in EUV, vacuum systems, clean transfer, and full production system integration allows for rapid development of new EUV Metrology Tools and improvements to existing tools

 
 

Products

 
 

EUV Reflectometer

Tool to measure the reflectivity and uniformity of multilayer coatings and absorbers of EUV Masks

EUV Accelerated Exposure Tool

Tool is designed to replicate the EUV Scanner conditions and perform accelerated EUV exposure testing of samples in a Hydrogen environment

EUV Pellicle Transmission Tool

Tool can measure EUV transmission of a freestanding pellicle

EUV Resist Testing Tool

Designed to quickly expose a wafer with EUV to determine Resist characteristics

Pellicle Test Suite

Suite of tools to test pellicle thermal stability, pump/vent, and mechanical shock

Ultra Clean Transfer System

Ultra clean transfer system to transfer a EUV mask from an RSP-200 opener to the process chamber

EUV Microscope

A high performance EUV Microscope utilizing a zone plate for mask imaging and defect printability review

Particle Free Pumping Cart

Tool is used to pump out beamline chambers without introducing particles into beamline

 

In development

EUV N&K Measurement Tool

An EUV Variable angle tool to measure N&K on an EUV Photomask

EUV Pellicle Mount/Demount

Automated tool for Mounting/Demounting of an EUV Pellicle with industry-leading front end openers, robotics, and ultra clean air handling systems

EUV Scatterometer – Mask Roughness Measurement

A metrology tool for characterizing mask roughness

EUV Scatterometer - CD Measurement

A metrology tool for characterizing periodic structures, regarding critical dimension (CD), and other profile properties