Actinic Image Review System (AIRES®)

The AIRES® system addresses the industry need for general purpose actinic Extreme Ultraviolet (EUV) mask imaging and defect printability review. The zoneplate-based imaging system enables direct ultra-high magnification onto a CCD camera and unparalleled flexibility in imaging modes.

AIRES features EUV Tech’s patented zoneplate imaging system enabling diffraction limited performance within an incredibly compact package. The zoneplate imaging architecture provides substantial benefits in flexibility, purchase price, cost of ownership, and footprint.

Features & Benefits:

• 13.5 nm EUV light from a high brightness Laser-Produced Plasma (LPP) source

• Zoneplate library and exchange system

• High NA upgradeable

• Variable illumination supporting SMO

• Full internal diagnostics and EUV throughput monitoring

To request the product data sheet, please fill out the Contact Form and the data sheet will be emailed to you.