Operating System:

Windows 11, Windows 10 (version 21H2 or higher), Windows Server 2019,
Windows Server 2022

Note: Support for Windows Server 2019 will be discontinued in an upcoming release.

Processor:

Any Intel or AMD x86-64 processor with two or more cores (minimum)

Any Intel or AMD x86-64 processor with four or more cores and AVX2 instruction set support (recommended)

Note: A future release of MATLAB will require a processor with AVX2 instruction set support.

Storage:

3.8 GB for just MATLAB

4-6 GB for a typical installation

23 GB for an all products installation

An SSD is strongly recommended

RAM:

8 GB (minimum)

16 GB (recommended)

Graphics:

No specific graphics card is required, but a hardware accelerated graphics card supporting OpenGL 3.3 with 1GB GPU memory is recommended.

Display:

1024x768 resolution, or higher

SuMMIT (SEM Metrology Interactive Toolbox) is a rigorous, reproducible, powerful and user-friendly off-line analysis package for line-edge roughness/line-width roughness (LER/LWR) processing and critical dimension (CD) analysis of SEM, as well as other images. This feature-rich analysis program integrates a variety of visualization tools and numerous built-in processing algorithms into a user-friendly graphical user interface (GUI).

SuMMIT is also capable of performing large unattended batch tasks, allowing large volumes of data to be analyzed quickly.

A comprehensive description of SuMMIT and its capabilities can be found on our software Product page under Features.

As critical dimensions are pushed ever smaller, LER and LWR are of increasing concern and importance. The task of understanding and minimizing line-edge roughness requires repeatable, accurate and insightful characterization of the properties of this roughness. The SuMMIT software package has been written exclusively to facilitate this task.

• Going beyond the conventional characterization of LER as a single 3-sigma deviation number, SuMMIT provides a wealth of integrated spectral analysis and visualizations techniques

• Allows for exporting of detailed analysis results to .csv and Matlab files for further manipulation, comparison and display

• Supports batch processing of large volumes of data, enabling applications such as large parametric studies, large sample studies for the generation of statistically significant results and LER-based process-window studies

• SuMMIT Includes scripting capabilities that enable most program operations to be automated. Scripts can also be run from the command line, allowing SuMMIT calculations to be readily integrated into a larger measurement stream.

• SuMMIT was designed with flexibility and automation in mind and has had the benefit of four years of real-world use in various organizations. Not all algorithms are optimal for all SEM images; therefore, SuMMIT provides a myriad of algorithms to choose from, allowing the user to tune automated line-finding algorithms, as well as the edge-detection and LER calculation algorithms.

• With the optional Developer's Kit, you can customize SuMMIT to meet even more specific metrology needs

• Because measurement consistency is of the utmost importance, SuMMIT includes a recipe tool that facilitates the definition, storage and distribution of metrology recipes

After you download the latest version of SuMMIT, contact us at sales@euvtech.com to purchase your individual license key.

You can download the latest version of the SuMMIT software from the Downloads page.

The add-on toolboxes are included in the SuMMIT software download; however, these features are not activated, please contact us at sales@euvtech.com to activate any of the add-on toolboxes.

Yes. Please contact us at sales@euvtech.com for more information

Yes. First, download the latest version of SuMMIT from our Downloads page and then contact us at sales@euvtech.com.

Time-limited trial licenses are also available upon request. Please contact us at sales@euvtech.com for details.

You can reach us via phone or email. See below for contact information.

Tel: (925) 385-8847
Email: support@euvtech.com