As a major developer of EUV metrology solutions and market leader in creating at-wavelength EUV tools, EUV Tech possesses the knowledge base, experience and expertise to provide in-house measurement services for those products.

EUV Tech’s measurement capabilities include, but are not limited to:

• EUV reflectivity measurements

• EUV transmission measurements

• EUV scatterometry measurements

• EUV n and k, phase, thickness and spectral response measurements

Sample form factors include photomasks, pellicles, thin films, wafers, coupons and optics.