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  • Tool to measure the reflectivity and uniformity of multilayer coatings and absorbers for EUV masks
  • Over 18 EUV Reflectometers have been produced since 2002
  • Ultra Clean Transfer System and better than synchrotron quality measurement performance in a stand alone tool
  • Successive generations have seen continuous improvement in measurement performance, acquisition speed, and cleanliness.
  • Latest generation “HVM” reflectometers have been delivered to multiple customers worldwide