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The EUV Accelerated Exposure Tool is designed to replicate the EUV Scanner conditions and perform accelerated EUV exposure testing on an EUV photomask, EUV Pellicle, Frame, or any other sample

  • Tool can be used to validate EUV Mask Repair
  • A novel optical system to provide in-band spectrum of illumination by integrating the Energetiq EQ-10HP source
  • Fully safety interlocked Hydrogen flow rates will be configurable to match Hydrogen flow of scanner