Founded in 1997, EUV Tech has pioneered the development of EUV metrology tools. Our products have been in operation at customer facilities for over 25 years

At EUV Tech, we enable the frontiers of semiconductor manufacturing and material science through the development of world leading EUV and soft x-ray instrumentation and techniques.

Our Mission

Our Purpose

Since our founding, EUV Tech’s mission has not wavered in either intent or goal - to set the benchmark for the strategic and rapid development of precision-built EUV metrology equipment. Our expertise in EUV, soft-x-ray instrumentation, vacuum systems, clean transfer, and full-production system integration allows for rapid development of new EUV metrology tools and improvements to existing tools.

At EUV Tech, we believe in pushing the boundaries of what can be achieved in the production of EUV metrology equipment. We do this by not only achieving or exceeding product design specifications, but also by providing world-class customer support to our business partners.  

Our Values

At our core, we believe in shared synergy, in diversity, and in maintaining a collaborative entrepreneurial mindset. The driving force behind EUV Tech is a collective of highly skilled and focused individuals, who are dedicated to supporting the semiconductor manufacturing industry by designing, developing, and delivering industry-leading at-wavelength EUV metrology equipment. 

Every employee is a valued and respected member of the EUV Tech team, and we are committed to the professional development and success of each individual.